Nanofabrication and Microfluidics

MTIF´s clean rooms house the latest in micro and nano-fabrication processes and equipment. The facility works on silica, glass, metal and polymer substrates using a range of deposition techniques including spin coaters, magnetron sputtering and Atomic Layer Deposition followed by annealing, curing, and sintering as required. A wide range of patterning processes are available including mask-less photolithography, laser ablation and laser processing. 

Thin Films Laboratory

A variety of assistive technologies for materials deposition, including physical and chemical deposition techniques, such as RF magnetron sputtering, atomic layer deposition and thermal evaporation of nano-engineered coatings and thin films. These are applicable across a broad range of industrial applications such as, optical coatings, plasmonic thin films, SERS sensors and large-area electronic devices.

Laser Processing Laboratory

Specialised laser processing facility for developing new materials or functionalising existing materials, in controlled environments. Capable of investigating all the parameters of this multiparametric processing technique in the design, implementation and testing of materials for nano-structuring, texturing and functionalisation.

Photonics Laboratory

Part of the specialised material and surface modification capability utilising photonic processing in controlled environments. The interaction of light with materials is exploited using a suite of state-of-the-art optical metrology techniques including a unique IR Spectroscopic Ellipsometer that accurately measures the dielectric permittivity of materials in the spectral range of 1.7 – 40 microns. Of particularly interest is the control and enhancement of the light-matter interaction with suitably engineered nanostructures, such as optical antennas or resonators. The manipulation of optical fields at the nanometer scale is important for enhancing the performance and efficiency of photodetectors, light emitting devices and optical sensors.

Optics Laboratory

Part of the specialised material and surface modification capability using photonic processing in controlled environments. The interaction of light with materials is exploited using a suite of state-of-the-art optical metrology techniques, including a unique IR Spectroscopic Ellipsometer that accurately measures the dielectric permittivity of materials in the spectral range of 1.7 – 40 microns.

Nanofabrication and Microfluidics Facility

AVAILABLE EQUIPMENT 
YES HDMS ovenYES HDMS oven
Veeco WYKO 1100 white light interferometric profilelometer
Tresky T-3002-PRO die bonderTresky T-3002-PRO die bonding
SUSS LabSpin8TTSUSS LS8TT FR
Slot Die coater
PS4L semiprobe connected to Keithley 4200A Parameter analyserSemiprobe PS4L
NIR laminator with Adphos NIR lamp
Nanoelectrospray system
Multi-target RF magnetron systems
Microwriter maskless alignerMicrowriter Maskless Aligner
MakerBot 3d printer
HAAKE CaBER1 extensional rheometerHAAKE CaBER 1 Extensional rheometer
Formlabs SLA 3D printers
Fisnar F9000N XYZ robot furnished with eco spray/pen and LIQUIDYN heads Fisnar 9600N XYZ Robot
Filmetrics f20 reflectometer
Diener Tetra 45 plasma etcherDiener Reactive Plasma Etcher Tetra 45
DektakXT stylus profilometer
AVT PEO-604 oxidation oven
ALD systems
AKTIPRINT Mini/e SMALL UV DRYER
3 TruMark Series 3000 Trumpf
3 excimer lasers
1 Trotec SP500 CO2 laser cutter
1 Quantel Q-Smart 850 laser
1 He-Cd Omnicrome
Bruker NIR ellipsometer