JEOL JSM-7100F LV FEG-SEM
The JSM-7100F LV FEG-SEM offers a guaranteed resolution for SEI of 1.2 nm (30 kV), 3.0 nm (1 kV), and 3.0 nm (15 kV, probe current 5 nA) with a magnification range of 10 to 1,000,000. The system offers accelerating voltages from 0.2-30 kV with a maximum probe current of 200 nA.
The system is equipped with 5 axis motor-controlled specimen stage X, Y: 70 – 50 mm, Z: 3 – 41 mm, Tilt: -5 to +70 degrees, Rotation: 360 degrees. Sample access is provided with a rapid pump airlock.
The system is equipped for BEI and low vacuum mode in addition to SEI. An Oxford Instruments X-Maxn EDS with 80 mm2 window is also equipped along with the accompanying AZtec analysis software.